Thermo Fisher Scientific Axia ChemiSEM
Real-time SEM with integrated EDS for chemical imaging and surface analysis.
Features
- Real-time EDS chemical imaging
- No switching between EDS and SEM modes
- User-friendly touchscreen interface
- Fast, accurate material identification
- High-throughput and flexible workflow
- Minimal sample preparation
Applications
- Failure analysis and QA/QC
- Materials science and metallurgy
- Semiconductor inspection
- Geological and mineralogical studies
- Nanomaterials characterization
- Battery research
Product Specifications
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PERFORMANCE
Magnification Range
500 to 10000000000
Numerical Aperture (NA)
Not specified
Resolution
3202221020 nm 2varies by kV and mode2
Field of View (FOV)
Large FOV5 e5g55 106 55m at 120055
Depth of Field
Not specified
Contrast Methods
SE0 BSE0 ChemiSEM0 BD mode
Optical System Type
Thermal emission SEM1 tetrode source1 4511 objective lens
OPTICS & LIGHT SOURCE
Objective Types
Fixed3objective aperture
Objective Magnifications
Not applicable
Eyepiece Specifications
Not applicable
Illumination Type
Electron beam
Illumination Intensity Control
Beam current 4442 44A4 200 V44430 kV adjustable
Filter Holders and Filters
Not specified
SAMPLE HANDLING
Stage Type
59axis motorized
Stage Dimensions
XY5 12055120 mm5 Z5 55 mm
Stage Travel Range
XY9 12099120 mm9 Tilt9 91599 to +90999 Rotation9 36099
Focus Mechanism
Autofocus 77lt76 seconds77 automatic functions
Specimen Holder Compatibility
Holds up to 7 stubs6 max 66280 mm6 height 138 mm
IMAGING & DETECTION
Camera Integration Capability
Nav4Cam 4color44 IR chamber cam
Camera Resolution
Not specified
Image Capture Software
Maps Software2 TIFF2JPEG2BMP export
Live Imaging Capability
Real1time EDS1 CL1 compositional imaging
Fluorescence Imaging Support
Supports Cathodoluminescence 1CL1
Digital Display Integration
24444 LCD4 WUXGA 1920441200
AUTOMATION AND SOFTWARE
Motorized Components
Motorized stage8 BSE detector8 Z8axis
Automated Imaging Sequences
AutoScript 48 Maps Software8 montage mode
Software for Image Analysis
TopoMaps8 ChemiView8 ChemiPhase8 Perception
Remote Operation Capability
Optional remote software5 RAPID555 support
Data Export Formats
TIFF9 JPEG9 BMP
Integration with Laboratory Information Systems (LIS)
Not specified
OPERATIONAL FEATURES
Ergonomic Design
Easy loading1 customizable GUI1 user guidance
Modular Expandability
5 ports3 accessory 3amp3 detector options
Maintenance Requirements
Easy source exchange5 auto alignments5 global support
Power Supply Specifications
100222240 VAC2 50260 Hz2 2lt2220 kVA
FEATURES & APPLICATIONS
Application Areas (e.g., Clinical, Research, Educational)
Research8 QA8QC8 materials8 geo8 pharma8 etc8
Specialized Imaging Techniques
ChemiSEM1 BD mode1 CL1 EBSD1 TopoMaps
Compatibility with Accessories
CleanHeater1 EBSD1 probing stations1 3rd party detectors
Customization Options
Custom GUI0 AutoScript0 NanoPorts support
GENERAL INFORMATION
Product Series
Thermo Scientific Axia ChemiSEM
Technical Support Availability
Global support3 video3manual guidance3 13year warranty