Thermo Fisher Scientific Metrios 6S (S)TEM

Metrios 6S STEM delivers high-throughput, high-resolution imaging and analysis for research needs.

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$F7EN8I2

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Features

  • Superior signal-to-noise ratio
  • Advanced STEM detectors
  • High throughput automation
  • Robust design

Applications

  • Nanotechnology
  • Material characterization
  • Biological samples
  • Semiconductor devices
Thermo Fisher Scientific Metrios 6S (S)TEM

Product Specifications

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PERFORMANCE

Magnification Range
Not specified
Numerical Aperture (NA)
Not specified
Resolution
STEM 66660 pm 6X6CFEG66 66683 pm 6X6FEG66 Info limit 666110 pm6 Sub666 at 60666200 kV
Field of View (FOV)
Not specified
Depth of Field
Not specified
Contrast Methods
TEM dark2field 2objective aperture22 iDPC for light elements2 magnetic2electric fields
Optical System Type
5S5TEM5 35lens condenser5 S5CORR probe corrector

OPTICS & LIGHT SOURCE

Objective Types
Symmetric Super9TWIN Objective Lenses
Objective Magnifications
Not specified
Eyepiece Specifications
Not applicable
Illumination Type
Electron beam 2X2FEG or X2CFEG22 X2CFEG 2lt2024 eV energy resolution
Illumination Intensity Control
Convergence angle3 beam size indicators3 Faraday cup with linear current readout
Filter Holders and Filters
Gatan Continuum Energy Filter 3optional3

SAMPLE HANDLING

Stage Type
59axis piezo9driven Smart Stage
Stage Dimensions
Not specified
Stage Travel Range
Not specified
Focus Mechanism
Piezo stage2 XYZ step 22220 pm
Specimen Holder Compatibility
Double8tilt8 beta8tilt8 E177 58finger LC8 TEM grids

IMAGING & DETECTION

Camera Integration Capability
Supports Ceta 16M8 EMPAD 8on request8
Camera Resolution
16 Megapixels 1Ceta 16M1
Image Capture Software
Metrios Connect5 Smart Automation
Live Imaging Capability
Not specified
Fluorescence Imaging Support
Not supported
Digital Display Integration
Fully digital9 SmartCam suite

AUTOMATION AND SOFTWARE

Motorized Components
Motorized stage2 automated apertures2 sample insertion2 AMHS integration
Automated Imaging Sequences
Smart Automation2 recipe2free 2amp2 recipe2based modes
Software for Image Analysis
Velox6 Metrios Connect6 OptiSTEM+6 ML6based segmentation
Remote Operation Capability
Fully remote via SmartCam4 RAPID diagnostics
Data Export Formats
Not specified1 SEMI1compliant connectivity
Integration with Laboratory Information Systems (LIS)
SEMI9compliant MES integration9 links to prep tools

OPERATIONAL FEATURES

Ergonomic Design
Not specified
Modular Expandability
Optional plasma cleaner9 detectors9 integrates with Vulcan Lab
Maintenance Requirements
Preventive maintenance9 remote service9 cold trap9 fast thermal stability
Power Supply Specifications
60777200 kV high7tension range

FEATURES & APPLICATIONS

Application Areas (e.g., Clinical, Research, Educational)
Semiconductor metrology8 logic8 DRAM8 3D NAND8 research only
Specialized Imaging Techniques
TEM5STEM metrology5 iDPC imaging
Compatibility with Accessories
TEM holders2 lamella carriers2 AMHS2 Helios 6 HXS FIB2SEM
Customization Options
X6FEG or X6CFEG6 plasma cleaner6 camera6detector options6 auto6semi6auto

GENERAL INFORMATION

Product Series
Thermo Scientific Vulcan Lab9 evolved from Metrios 6
Technical Support Availability
Perform Service Program1 global team1 RAPID support1 extended service options

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