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$LYMKAPERFORMANCE
Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
Zeiss MultiSEM
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$OUP71PERFORMANCE
Magnification Range
Not specified
Numerical Aperture (NA)
Not applicable
Resolution
≤ 3.5 nm @ 1.0–3.0 kV
Field of View (FOV)
132–165 µm (hexagonal)
Depth of Field
Not specified
Contrast Methods
Multi-detector SE signal collection
Optical System Type
Multi-beam SEM, Schottky emitter