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$CHEYA3PPERFORMANCE
Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
Thermo Fisher Scientific Helios 5 EXL DualBeam
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$ROSTGN3PERFORMANCE
Magnification Range
High (atomic-scale, sub-nanometer insight; exact range not specified)
Numerical Aperture (NA)
Not applicable
Resolution
Electron: 1.0 nm @ 15 kV; 0.9 nm @ 1 kVIon: 4.0 nm @ 30 kV; 550 nm @ 500 V
Field of View (FOV)
Optional optical microscope: 920 µm
Depth of Field
Not specified
Contrast Methods
SE (TLD-SE), BSE (TLD-BSE), ICE (SI/SE), optional STEM (BF/DF/HAADF)
Optical System Type
DualBeam FIB-SEM (Phoenix Ion + Elstar Electron Columns)