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$SYQ10AHPERFORMANCE
Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
Thermo Fisher Scientific Helios 5 PFIB DualBeam
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$MIJNTQ4PERFORMANCE
Magnification Range
Not specified
Numerical Aperture (NA)
Not applicable
Resolution
e⁻: 0.6–1.2 nm; ion: <10–20 nm at 30 kV
Field of View (FOV)
e⁻: 2.3 mm; ion: 0.9 mm
Depth of Field
Not specified
Contrast Methods
DCFI, SmartScan™, 6-detector contrast system
Optical System Type
Elstar HR FE-SEM + Xe+ PFIB with immersion lens