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$TSIO20PERFORMANCE
Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
Bruker FastScan Pro
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$OZDG9NPERFORMANCE
Magnification Range
Atomic-scale resolution; scanner ranges (FastScan: high-throughput 5-10x speed; Icon: 90µm scan)
Numerical Aperture (NA)
Not mentioned (AFM system)
Resolution
Nanoscale characterization; atomic-scale pinpoint force; trench imaging ~50 nm wide, ~65 nm deep
Field of View (FOV)
Up to 90 µm scan range (Icon scanner); increased XY travel for large samples/wafer mapping
Depth of Field
Not mentioned (AFM system)
Contrast Methods
Contact Mode, Tapping Mode, PeakForce Tapping, ScanAsyst; electrical, magnetic, mechanical property mapping
Optical System Type
AFM with integrated optical pattern recognition (details not provided)