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$6BGPINPERFORMANCE
Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
Hitachi High-Tech Ultrahigh-Resolution Scanning Electron Microscope SU8600
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$CRIM1PPERFORMANCE
Magnification Range
20 to 2,000,000×
Numerical Aperture (NA)
Not specified
Resolution
0.6 nm@15 kV; 0.7 nm@1 kV (deceleration mode)
Field of View (FOV)
Not specified
Depth of Field
Not specified
Contrast Methods
SE/BSE mixing (UD with ExB filter), LD standard; optional TD, IMD, OCD, PD-BSED, CLD, STEM
Optical System Type
Cold cathode field emission gun with anode heating; CFE-SEM platform