Hitachi High-Tech Scanning Electron Microscopes SU3800

Magnification Range

SU3800: ×5–300,000

Numerical Aperture (NA)

Not specified

Resolution

SE: 3.0 nm@30 kV (SU3800); 15.0 nm@1 kV (SU3800); BSE: 4.0 nm@30 kV (SU3800)

Field of View (FOV)

SU3800: 127 mm dia

Depth of Field

Not specified

Contrast Methods

Simultaneous signals; Segmented BSED; STEM holder for transmitted images

Optical System Type

Tungsten hairpin filament electron gun; 4-hole movable aperture; SE & semiconductor BSED

Motorized Components

5-axis motor drive stage; automatic rotation

Automated Imaging Sequences

Multi Zigzag automatic field acquisition; various auto functions (AFS, ABCC, AFC, ASC, ABA)

Software for Image Analysis

Image-Pro® for Hitachi; data input, measurement, stage navigation; Hitachi map 3D* for 3D models

Remote Operation Capability

Optional external communication interface

Data Export Formats

Microsoft® Office formats via Report Creator

Integration with Laboratory Information Systems (LIS)

Not specified

Ergonomic Design

GUI with mouse, touchscreen, control panel; integrated SEM/EDS control

Modular Expandability

many optional hardware/software

Maintenance Requirements

IFT for automatic filament monitoring & long life

Power Supply Specifications

Not specified

Product Series

Hitachi High-Tech SEM SU3800

Technical Support Availability

Contact info available; no detailed scope mentioned