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$W32A9C

PERFORMANCE

Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
Thermo Fisher Scientific Phenom ParticleX AM Desktop SEM

Thermo Fisher Scientific Phenom ParticleX AM Desktop SEM

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$GO7MTZ

PERFORMANCE

Magnification Range

Electron 160–200,000x; Light 3–16x

Numerical Aperture (NA)

Not specified

Resolution

<10 nm

Field of View (FOV)

Scan area 100×100 mm

Depth of Field

Not specified

Contrast Methods

4-segment BSE detector (chemical contrast); optional SED (surface/topography); bright/dark field light

Optical System Type

Electron optical with CeB₆ thermionic source; light optical illumination

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