Agilent SureScan

Scanning Resolution

2 µm, 3 µm, 5 µm, 10 µm; Pixel Error at 5 µm

Dynamic Range

Not specified

Sensitivity

Detection limit: 0.07 cpsm (Agilent); ~50 counts/pixel

Signal-to-Noise Ratio

Avg S/N >5000 counts: Agilent 149, Brand Y 51, Brand Z 19

Scan Speed

3 µm: 16 min; 2 µm: 24 min (61×21.6 mm); ~1 hr for 8 scans

Reproducibility

Agilent SD log(Ratio): 0.007; Uniformity <2%; Pixel Error: 1 @ 5 µm