Thermo Fisher Scientific Axia ChemiSEM

Real-time SEM with integrated EDS for chemical imaging and surface analysis.

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$3Y1QEP

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Features

  • Real-time EDS chemical imaging
  • No switching between EDS and SEM modes
  • User-friendly touchscreen interface
  • Fast, accurate material identification
  • High-throughput and flexible workflow
  • Minimal sample preparation

Applications

  • Failure analysis and QA/QC
  • Materials science and metallurgy
  • Semiconductor inspection
  • Geological and mineralogical studies
  • Nanomaterials characterization
  • Battery research
Thermo Fisher Scientific Axia ChemiSEM

Product Specifications

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PERFORMANCE

Magnification Range
599 to 19000900099
Numerical Aperture (NA)
Not specified
Resolution
3404441040 nm 4varies by kV and mode4
Field of View (FOV)
Large FOV2 e2g22 106 22m at 120022
Depth of Field
Not specified
Contrast Methods
SE6 BSE6 ChemiSEM6 BD mode
Optical System Type
Thermal emission SEM2 tetrode source2 4522 objective lens

OPTICS & LIGHT SOURCE

Objective Types
Fixed5objective aperture
Objective Magnifications
Not applicable
Eyepiece Specifications
Not applicable
Illumination Type
Electron beam
Illumination Intensity Control
Beam current 3332 33A3 200 V33330 kV adjustable
Filter Holders and Filters
Not specified

SAMPLE HANDLING

Stage Type
57axis motorized
Stage Dimensions
XY1 12011120 mm1 Z1 55 mm
Stage Travel Range
XY5 12055120 mm5 Tilt5 51555 to +90555 Rotation5 36055
Focus Mechanism
Autofocus 88lt86 seconds88 automatic functions
Specimen Holder Compatibility
Holds up to 7 stubs0 max 00280 mm0 height 138 mm

IMAGING & DETECTION

Camera Integration Capability
Nav0Cam 0color00 IR chamber cam
Camera Resolution
Not specified
Image Capture Software
Maps Software3 TIFF3JPEG3BMP export
Live Imaging Capability
Real2time EDS2 CL2 compositional imaging
Fluorescence Imaging Support
Supports Cathodoluminescence 5CL5
Digital Display Integration
24666 LCD6 WUXGA 1920661200

AUTOMATION AND SOFTWARE

Motorized Components
Motorized stage0 BSE detector0 Z0axis
Automated Imaging Sequences
AutoScript 46 Maps Software6 montage mode
Software for Image Analysis
TopoMaps5 ChemiView5 ChemiPhase5 Perception
Remote Operation Capability
Optional remote software0 RAPID000 support
Data Export Formats
TIFF3 JPEG3 BMP
Integration with Laboratory Information Systems (LIS)
Not specified

OPERATIONAL FEATURES

Ergonomic Design
Easy loading0 customizable GUI0 user guidance
Modular Expandability
5 ports2 accessory 2amp2 detector options
Maintenance Requirements
Easy source exchange0 auto alignments0 global support
Power Supply Specifications
100888240 VAC8 50860 Hz8 8lt8280 kVA

FEATURES & APPLICATIONS

Application Areas (e.g., Clinical, Research, Educational)
Research9 QA9QC9 materials9 geo9 pharma9 etc9
Specialized Imaging Techniques
ChemiSEM7 BD mode7 CL7 EBSD7 TopoMaps
Compatibility with Accessories
CleanHeater3 EBSD3 probing stations3 3rd party detectors
Customization Options
Custom GUI6 AutoScript6 NanoPorts support

GENERAL INFORMATION

Product Series
Thermo Scientific Axia ChemiSEM
Technical Support Availability
Global support4 video4manual guidance4 14year warranty

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