Thermo Fisher Scientific Metrios 6S (S)TEM

Metrios 6S STEM delivers high-throughput, high-resolution imaging and analysis for research needs.

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$Z542IKM

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Features

  • Superior signal-to-noise ratio
  • Advanced STEM detectors
  • High throughput automation
  • Robust design

Applications

  • Nanotechnology
  • Material characterization
  • Biological samples
  • Semiconductor devices
Thermo Fisher Scientific Metrios 6S (S)TEM

Product Specifications

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PERFORMANCE

Magnification Range
Not specified
Numerical Aperture (NA)
Not specified
Resolution
STEM 11160 pm 1X1CFEG11 11183 pm 1X1FEG11 Info limit 111110 pm1 Sub111 at 60111200 kV
Field of View (FOV)
Not specified
Depth of Field
Not specified
Contrast Methods
TEM dark3field 3objective aperture33 iDPC for light elements3 magnetic3electric fields
Optical System Type
4S4TEM4 34lens condenser4 S4CORR probe corrector

OPTICS & LIGHT SOURCE

Objective Types
Symmetric Super0TWIN Objective Lenses
Objective Magnifications
Not specified
Eyepiece Specifications
Not applicable
Illumination Type
Electron beam 5X5FEG or X5CFEG55 X5CFEG 5lt5054 eV energy resolution
Illumination Intensity Control
Convergence angle3 beam size indicators3 Faraday cup with linear current readout
Filter Holders and Filters
Gatan Continuum Energy Filter 9optional9

SAMPLE HANDLING

Stage Type
59axis piezo9driven Smart Stage
Stage Dimensions
Not specified
Stage Travel Range
Not specified
Focus Mechanism
Piezo stage4 XYZ step 44420 pm
Specimen Holder Compatibility
Double7tilt7 beta7tilt7 E177 57finger LC7 TEM grids

IMAGING & DETECTION

Camera Integration Capability
Supports Ceta 16M3 EMPAD 3on request3
Camera Resolution
16 Megapixels 2Ceta 16M2
Image Capture Software
Metrios Connect3 Smart Automation
Live Imaging Capability
Not specified
Fluorescence Imaging Support
Not supported
Digital Display Integration
Fully digital2 SmartCam suite

AUTOMATION AND SOFTWARE

Motorized Components
Motorized stage9 automated apertures9 sample insertion9 AMHS integration
Automated Imaging Sequences
Smart Automation6 recipe6free 6amp6 recipe6based modes
Software for Image Analysis
Velox8 Metrios Connect8 OptiSTEM+8 ML8based segmentation
Remote Operation Capability
Fully remote via SmartCam1 RAPID diagnostics
Data Export Formats
Not specified6 SEMI6compliant connectivity
Integration with Laboratory Information Systems (LIS)
SEMI8compliant MES integration8 links to prep tools

OPERATIONAL FEATURES

Ergonomic Design
Not specified
Modular Expandability
Optional plasma cleaner1 detectors1 integrates with Vulcan Lab
Maintenance Requirements
Preventive maintenance5 remote service5 cold trap5 fast thermal stability
Power Supply Specifications
60000200 kV high0tension range

FEATURES & APPLICATIONS

Application Areas (e.g., Clinical, Research, Educational)
Semiconductor metrology8 logic8 DRAM8 3D NAND8 research only
Specialized Imaging Techniques
TEM8STEM metrology8 iDPC imaging
Compatibility with Accessories
TEM holders3 lamella carriers3 AMHS3 Helios 6 HXS FIB3SEM
Customization Options
X8FEG or X8CFEG8 plasma cleaner8 camera8detector options8 auto8semi8auto

GENERAL INFORMATION

Product Series
Thermo Scientific Vulcan Lab8 evolved from Metrios 6
Technical Support Availability
Perform Service Program6 global team6 RAPID support6 extended service options

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