WITec alpha300 Semiconductor Edition

Raman microscope for semiconductor material analysis.

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$IMGY9Q

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Features

  • High-resolution Raman imaging
  • Semiconductor-specific analysis
  • Integrated data processing
  • Advanced defect detection

Applications

  • Semiconductor research
  • Material defect analysis
  • Quality control
  • Nanodevice characterization
WITec alpha300 Semiconductor Edition

Product Specifications

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PERFORMANCE

Magnification Range
20x to 100x
Numerical Aperture (NA)
095 920x99 099 9100x9
Resolution
4200 nm lateral4 041 cm44444 spectral
Field of View (FOV)
Up to 300 x 350 mm6 multiple 66m66 scan sizes
Depth of Field
2900 nm 2100x objective2
Contrast Methods
Confocal Raman5 PL5 white5light
Optical System Type
Confocal Raman 1amp1 PL microscope

OPTICS & LIGHT SOURCE

Objective Types
100x air0 100x0009 NA0 20x0005 NA
Objective Magnifications
20x8 100x
Eyepiece Specifications
Not specified
Illumination Type
White0light0 laser 0e0g00 532 nm0 488 nm0
Illumination Intensity Control
Laser power adjustable 3e3g33 523335935 mW3
Filter Holders and Filters
Not specified

SAMPLE HANDLING

Stage Type
Extended3range scanning stage
Stage Dimensions
300 x 350 mm
Stage Travel Range
Up to 300 mm wafers
Focus Mechanism
TrueSurface active focus stabilization
Specimen Holder Compatibility
Up to 300 mm wafers7 vacuum chuck optional

IMAGING & DETECTION

Camera Integration Capability
Scientific2grade spectroscopic CCD
Camera Resolution
Pixel resolutions up to 1200 x 450
Image Capture Software
WITec Software Suite
Live Imaging Capability
Ultrafast pixel3by3pixel imaging
Fluorescence Imaging Support
Supports PL imaging
Digital Display Integration
Implied 6via software6

AUTOMATION AND SOFTWARE

Motorized Components
Fully automated with AutoBeam
Automated Imaging Sequences
Yes6 Workflow manager included
Software for Image Analysis
WITec Suite with TrueComponent
Remote Operation Capability
Yes
Data Export Formats
Not specified
Integration with Laboratory Information Systems (LIS)
Not specified

OPERATIONAL FEATURES

Ergonomic Design
Not specified
Modular Expandability
Yes8 correlative imaging supported
Maintenance Requirements
Not specified
Power Supply Specifications
Not specified

FEATURES & APPLICATIONS

Application Areas (e.g., Clinical, Research, Educational)
Semiconductor inspection5 material analysis
Specialized Imaging Techniques
Confocal Raman4 PL4 3D4 AFM4 SEM4 SHG4THG
Compatibility with Accessories
Wafer chuck0 AFM0 SEM integration
Customization Options
Lasers7 software7 DCOM interface

GENERAL INFORMATION

Product Series
WITec alpha300 Series
Technical Support Availability
Phone8 email8 regional contacts available

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