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$EYPLDAPERFORMANCE
Magnification Range
Numerical Aperture (NA)
Resolution
Field of View (FOV)
Depth of Field
Contrast Methods
Optical System Type
WITec alpha300 Semiconductor Edition
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$PU7Y50PERFORMANCE
Magnification Range
20x to 100x
Numerical Aperture (NA)
0.5 (20x), 0.9 (100x)
Resolution
~200 nm lateral; 0.1 cm⁻¹ spectral
Field of View (FOV)
Up to 300 x 350 mm; multiple µm² scan sizes
Depth of Field
~900 nm (100x objective)
Contrast Methods
Confocal Raman, PL, white-light
Optical System Type
Confocal Raman & PL microscope
Zeiss MultiSEM
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$I6WYPPERFORMANCE
Magnification Range
Not specified
Numerical Aperture (NA)
Not applicable
Resolution
≤ 3.5 nm @ 1.0–3.0 kV
Field of View (FOV)
132–165 µm (hexagonal)
Depth of Field
Not specified
Contrast Methods
Multi-detector SE signal collection
Optical System Type
Multi-beam SEM, Schottky emitter